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1. Study on nucleation and propagation of median cracks generated by scratching single crystal silicon EI SCOPUS SCIE

作者:Yao, Longxu; Zhang, Lei; Ge, Peiqi; Gao, Yufei; Wang, Hui

作者机构:[Yao, Longxu; Zhang, Lei; Ge, Peiqi; Gao, Yufei; Wang, Hui] Shandong Univ, Natl Demonstrat Ctr Expt Mech Engn Educ, Sch Mech Engn,Minist Educ, Key Lab High Efficiency & Clean Mech Manufacture, Jinan 250061, Shandong, Peoples R China.

来源:MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2020,Vol.105

资源类型:期刊论文

WOS:000493393800006

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