标题：THE ACCELEROMETER UTILIZING THE TRANSVERSE VIBRATION MODE OF LGT PIEZOELECTRIC CRYSTAL
作者：Wu, Guang-da; Liu, Xue-liang; Yu, Fa-peng; Li, Fang-lin; Tian, Shi-wei; Cheng, Xiu-feng; Zhao, Xian
作者机构：[Wu, Guang-da; Liu, Xue-liang; Yu, Fa-peng; Li, Fang-lin; Tian, Shi-wei; Cheng, Xiu-feng; Zhao, Xian] Shandong Univ, State Key Lab Crystal Mat, Jinan 更多
会议名称：13th Symposium on Piezoelectrcity, Acoustic Waves, and Device Applications (SPAWDA)
会议日期：JAN 11-14, 2019
来源：PROCEEDINGS OF THE 2019 13TH SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS (SPAWDA)
关键词：LGT crystal; Piezoelectric accelerometer; Transverse-vibration-mode
摘要：A transverse-vibration-mode piezoelectric accelerometer using La3Ga5.5Ta0.5O14 (LGT) single crystal was designed and fabricated for potential high temperature sensing applications. Dynamic modeling of the accelerometer based on the transverse-vibration-mode of LGT crystal was presented first, followed by crystal cut preparation, sensor design and assembly, experimental setup establishment and sensing test. The prototype of transverse-vibration-mode piezoelectric accelerometer was tested in the temperature range of 20 degrees C similar to 350 degrees C under 160Hz. The average sensitivity of the prototype was evaluated to be 3.3 pC/g over the tested temperature range and the linearity reached 1.2%. This work might supply an approach for design and fabrication of new piezoelectric accelerometers using the transverse-vibration-mode of piezoelectric crystal materials.