标题：Simultaneous measurement of surface shape and optical homogeneity with dual-wavelength phase-shifting digital holography
作者：Zheng, Xiaoyi ;Wang, Yurong ;Li, Jie ;Meng, Xiangfeng ;Sun, Yubao ;Du, Yanlong
作者机构：[Zheng, Xiaoyi ;Wang, Yurong ;Li, Jie ;Meng, Xiangfeng ;Sun, Yubao ;Du, Yanlong ] Shandong Provincial Key Laboratory of Laser Technology and Applicati 更多
会议名称：2011 Symposium on Photonics and Optoelectronics, SOPO 2011
会议日期：16 May 2011 through 18 May 2011
来源：2011 Symposium on Photonics and Optoelectronics, SOPO 2011
关键词：Digital holography; Optical homogeneity; Phase-shifting interferometer; Surface shape
摘要：Based on the difference of refractive index by different wavelengths in optical components, a novel method for measuring the optical homogeneity of optical components by using dual-wavelength phase-shifting digital holography has been proposed and verified by computer simulation. Meanwhile, this method could measure the surface shape of optical components accurately while we do not need to measure the front surface and rear surface of sample separately. Furthermore, the phase of reference wave and phase distortion caused by the object wave could be eliminated automatically, so the method has a function of automated optical wavefront distortion compensation, which can improve the measurement accuracy. ©2011 IEEE.