标题：Experiment and theory for the thickness effect of nano metal oxide gas sensing thin film the thickness effect and mesoscopic theory of conductance activity energy
作者：Jianping, Xing ;Qinghua, Yuan ;Donghua, Li ;Honglang, Lu ;Nanwan, Qiu
作者机构：[Jianping, Xing ] School of Information Science and Engineering, Shandong University, Ji'nan, 250100, China;[Donghua, Li ] Jinan Semiconductor Institu 更多
会议名称：2006 IEEE International Conference on Information Acquisition, ICIA 2006
会议日期：August 20, 2006 - August 23, 2006
来源：Proceedings of IEEE ICIA 2006 - 2006 IEEE International Conference on Information Acquisition
摘要：The Characteristics of Conductance activity energy of SnO2thin film varies with film thickness l and grain size r0are given by experiment results. The cross-section current formula of porous materials and the conductance formula of gas sensing thin film with adsorbed oxygen negative ion are given. The mesoscopic theory of nano-thin film conductance activity energy was proposed, and using the corrected Fermi statistic formula for the concentration of adsorbed negative ion, the theoretical curve of Eact varies with grain size r0yield; from which, the related problems are discussed. © 2006 IEEE.