标题：Research on image processing method in measuring tiny surface with projecting grating profilometry
作者：Xu, Jianqiang ;Wang, Yunshan ;Yun, Dazhen
作者机构：[Xu, Jianqiang ;Wang, Yunshan ;Yun, Dazhen ] School of Physics and Microelectron., Shandong University, Shandong 250061, China
会议名称：3th Conference on Experimental Mechanics
会议日期：October 15, 2001 - October 17, 2001
来源：Proceedings of SPIE - The International Society for Optical Engineering
摘要：In three-dimensional projecting grating profilometry, we are often persecuted by some disgusted phenomenon of images, such as reflecting flare, overlapping of grating and other noises. All these can bring a bigger error in image processing. The intention of this paper is to propose some new methods of image processing. The technique we applied is based on frequency domain digital image processing, morphology method and partial handling method. As the background disturbance can be eliminated by frequency domain filter, many noises can be suppressed and the distinguishing feature of grating can be accentuated by morphology method with suitable structure element and partial handling method. Thereby, the result of the surface shape can be calculated much better than the conventional method. The results of experiment indicate that new methods have remarkable effects.