标题：Design and analysis of an X-Y parallel nanopositioner supporting large-stroke servomechanism
作者：Liu, Pengbo;Yan, Peng;Zhang, Zhen
作者机构：[Liu, P] Key Laboratory of High-Efficiency and Clean Mechanical Manufacturing, School of Mechanical Engineering, Shandong University, Jinan, Shandong, 更多
通讯作者地址：[Yan, P]Shandong Univ, Sch Mech Engn, Key Lab High Efficiency & Clean Mech Mfg, Minist Educ, Jinan 250061, Shandong, Peoples R China.
来源：Proceedings of the Institution of Mechanical Engineers, Part C. Journal of mechanical engineering science
关键词：Nanopositioner;compliant mechanism;flexure stage;mechatronics;piezoelectric actuator
摘要：In this paper, we consider the design and analysis of an X-Y parallel piezoelectric-actuator-driven nanopositioner with a novel two-stage amplifying mechanism, where the mechanical design is optimized to achieve a large stroke and high-natural frequency for the purpose of high-performance servomechanism. The parallel kinematic X-Y flexure mechanism provides good geometric decoupling. The kinematic and dynamic analysis shows that the proposed design has a large work space and high bandwidth, which is further verified by finite-element analysis. The analysis results demonstrate that the designed nanopositioner has a large workspace more than 200 mu m and a high-natural frequency at about 760Hz. Furthermore, the dynamical model of the nanopositioner, including the dynamics of the PZT actuators, is also generated from the perspective of input/output transfer functions, and the parameters are identified by frequency-response experiments, which can be used for nano precision servomechanism.