标题：Co-doped ZnO-based transparent conducting thin film used in solar cells
作者：Wang, Hui ;Yuan, Yuzhen ;Liu, Hanfa ;Zhang, Huafu ;Liu, Yunyan ;Liu, Juncheng
作者机构：[Wang, Hui ;Liu, Juncheng ] School of Materials Science and Engineering, Shandong University of Technology, Zibo 255049, China;[Yuan, Yuzhen ;Liu, Han 更多
来源：Taiyangneng Xuebao/Acta Energiae Solaris Sinica
摘要：Transparent conducting Al, Zr co-doped ZnO thin film were successfully prepared by DC magnetron sputtering at room temperature. XRD and SEM were used to analyze and observation the structure and surface morphology of the film. The effects of target-substrate distance on structure and optoelectronic properties of film were analyzed intersively. The experimental results show that all the films are polycrystalline with a hexagonal structure and a preferred orientation along the C-axis. The target-substrate distance has a significant influence on the structure and electrical resistivity of Al, Zr co-doped ZnO transparent conductive thin film. The films thickness increase as the increase of the target-substrate distance, the lowest resistivity achieved is 1.05×10-3Ω·cm at the the target-substrate distance of 60 mm. The film present a high transmittance of above 92% in the visible range(500-800 nm), which have the potential application foreground for silicon based thin film solar cells.