标题:Morphology Characterization and Mechanism Analysis of the Microstructureof LiNbO_3 Crystals Fabricated by Using Focused Ion Beam Milling
作者:Peng Liu;Qing HUANG;Xue-Lin WANG
通讯作者:Liu, P
作者机构:[Liu, P] School of Physics, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China;[ Huang, Q] School of Physics, State K 更多
会议名称:Korea-China Symposium on Advanced Functional Films for Information
会议日期:AUG 16-21, 2009
来源:Journal of the Korean Physical Society
出版年:2010
卷:56
期:4
页码:1369-1373
DOI:10.3938/jkps.56.1369
关键词:Focused ion beam;Sputtering;Nonlinear optical crystals
摘要:This paper reports the basic results obtained from an investigation of the microstructure of lithium niobate (LiNbO_3) crystals fabricated by using the focused ion beam (FIB) sputtering method. The morphology characterization of the microstructure is explained in terms of scanning electron microscopy observations based on the geometrical integrity, surface smoothness, cross-sectional area, aspect ratio, etc. The optimized micro-fabrication conditions and the sample morphology characterization are presented, and the sputtering rate of Ga ions for a 30-keV energy milling of the LiNbO_3 crystal is calculated, which is lower than the theoretical one gained from \"The Stopping and Range of Ions in Matter\" (SRIM) sputtering simulation due to the redeposition effect being enhanced with increasing milling depth
收录类别:CPCI-S;SCOPUS;SCIE
WOS核心被引频次:1
Scopus被引频次:1
资源类型:会议论文;期刊论文
原文链接:https://www.scopus.com/inward/record.uri?eid=2-s2.0-77956366867&doi=10.3938%2fjkps.56.1369&partnerID=40&md5=ca3d8122b4471214850285ca6e17b92c
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