标题:Optical waveguide in stoichiometric lithium niobate by multi-low-energy helium ion implantation
作者:Zhang, Shao-Mei; Cai, Lu-Tong; Liu, Qi-Xin; Liu, Xiu-Hong; Ming, Xian-Bing
通讯作者:Zhang, SM
作者机构:[Zhang, Shao-Mei; Liu, Qi-Xin] Shandong Univ Sci & Technol, Coll Sci, Qingdao 266590, Peoples R China.; [Zhang, Shao-Mei; Cai, Lu-Tong; Liu, Xiu-Hon 更多
会议名称:18th International Conference on Ion Beam Modifications of Materials (IBMM)
会议日期:SEP 02-07, 2012
来源:NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
出版年:2013
卷:307
页码:438-441
DOI:10.1016/j.nimb.2012.12.071
关键词:Planar waveguide; Ion implantation; Lithium niobate
摘要:In this letter, we report on the fabrication of planar optical waveguide in stoichiometric lithium niobate by four-low-energy Helium ion implantation with relative low doses. The simulated refractive index profile reveals that the index-raised well exists in the near-surface ion implanted region. There are dark modes with positive changes of effective refractive indices measured by the prism coupling technique both at 633 and 1539 nm after annealing. Further, the small and homogenous damage depth profile proves that there should be the refractive index with positive change. Large energy of the modes is confined in the guiding region. The light was confined well in the waveguide by broad and homogenous index-raised region. Propagation loss for extraordinary refractive index is estimated to be similar to 1.2 dB/cm. (C) 2013 Elsevier B.V. All rights reserved.
收录类别:CPCI-S;EI;SCOPUS;SCIE
WOS核心被引频次:1
Scopus被引频次:1
资源类型:会议论文;期刊论文
原文链接:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84885180862&doi=10.1016%2fj.nimb.2012.12.071&partnerID=40&md5=37beeaeb03240fb821300d5c34786beb
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