标题：Experiment and theory for the thickness effect of nano metal oxide gas sensing thin film optimum size of crystal grains and theory of mesoscopic effect
作者：Honglang, Lu ;Jingjing, Sun ;Jianping, Xing ;Wenli, Liu ;Nanwan, Qiu
作者机构：[Honglang, Lu ] School of Mechanical Engineering, Jinan University, Jinan, 250022, China;[Wenli, Liu ;Nanwan, Qiu ] School of Physics and Microelectro 更多
会议名称：2006 IEEE International Conference on Information Acquisition, ICIA 2006
会议日期：August 20, 2006 - August 23, 2006
来源：Proceedings of IEEE ICIA 2006 - 2006 IEEE International Conference on Information Acquisition
摘要：The existence of the optimum film thickness and optimum grain size of nano metal oxide gas sensing thin films is given by experiment results. The existence of the optimum grain size is examined theoretically to be a new mesoscopic effect, resulting from the failure of Fermi statistic law of the adsorbed negative oxygen ion concentration when the grain size reduces to a certain range. According to Kubo's theory that as the grain size reduces to a characteristic length rmthe grain would be neutrality, Fermi statistics is modified, and therefore, the theoretical result of the optimum grain size r0* = 2rmis yielded. With the Kubo's formula of electron work function, the values of rmand r0* can be estimated, which consist with the experimental results.. © 2006 IEEE.