标题：Ion beam modification of two-dimensional materials: Characterization, properties, and applications
作者：Li, Ziqi; Chen, Feng
作者机构：[Li, Ziqi; Chen, Feng] Shandong Univ, Sch Phys, State Key Lab Crystal Mat, Key Lab Particle Phys & Particle Irradiat, Jinan 250100, Peoples R China.
通讯作者地址：[Chen, F]Shandong Univ, Sch Phys, State Key Lab Crystal Mat, Key Lab Particle Phys & Particle Irradiat, Jinan 250100, Peoples R China.
来源：APPLIED PHYSICS REVIEWS
摘要：The layered two-dimensional (2D) materials, e.g., the well-known graphene, transition metal dichalcogenides, and topological insulators, have attracted great interest of researchers from fundamental research as well as industries owing to their intriguing properties in a number of aspects. In practical applications, the efficient modification of the features of 2D materials is compelling and essential to achieve desired functionalities. Ion implantation has been successfully applied to synthesize graphene. The most exotic advantage of ion beam technology is that it offers distinct options of energetic beams, which has recently shown the unique capability to modify and tailor the properties of versatile 2D materials. To name a few, the energetic ion beams could implement the surface morphology or layer-to-layer structural engineering of 2D materials. At the microcosmic level, the introduction of ion beam induced defects and intentional doping of specific ions are the basis of tailoring properties of 2D materials. By manipulating the parameters of ion beams (energies, species, fluences, incident angles, etc.), the modified 2D materials may possess novel properties, which are unprecedented in pristine ones. Promising applications based on these 2D materials with ion beam tailored features have been realized in a broad range of fields. In this work, we systematically review the latest research progress on the deployed techniques and property modifications of graphene and other 2D materials under the treatment of various ion beams. A few selected applications are presented to indicate the practical potentials of ion beam modified 2D materials in distinct areas. Perspectives on future developments are also provided by focusing on several promising topics.