标题:A Large Range X-Y Parallel Micro-motion System with Optical Encoder Displacement Feedback
作者:Zhang, Zhiming; Hao, Guangbo; Yan, Peng
通讯作者:Yan, P;Yan, P;Hao, GB
作者机构:[Zhang, Zhiming; Yan, Peng] Shandong Univ, Sch Mech Engn, Minist Educ, Key Lab High Efficiency & Clean Mech Manufacture, Jinan, Shandong, Peoples R Ch 更多
会议名称:IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
会议日期:AUG 13-17, 2018
来源:2018 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) - CONFERENCE PROCEEDINGS
出版年:2018
页码:283-287
关键词:Large range micro stage; linear optical encoder; compliant mechanism
摘要:Linear optical encoders with a nano-resolution have been widely applied in various precision engineering fields for displacement feedback supporting micro/nano motions regulated by feedback control systems. However such sensing method is sensitive to assembly tolerance in the lateral motion (perpendicular to the primary direction), which limits its applications to single-axis motion systems or very small stroke multi-axis motion systems. In this paper, a large range X-Y parallel flexure-beam based micro-motion system is developed with an enhanced sensing framework employing two linear optical encoders to measure the two-axis large outputs. Meanwhile, both the open-loop and preliminary closed-loop experiments are conducted, demonstrating effectiveness of the proposed design and accurate sensing capability of the sensing framework.
收录类别:CPCI-S
资源类型:会议论文
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