标题:Preparation of Submicron Electrode for Electrochemical Micromachining by Multi-step Electrochemical Etching
作者:Liu Yong; Zhu Linsen
通讯作者:Liu, Y
作者机构:[Liu Yong; Zhu Linsen] Shandong Univ, Associated Engn Res Ctr Mech & Mechatron Equipmen, Weihai 264209, Peoples R China.
会议名称:3rd International Conference on Mechanical and Electronics Engineering (ICMEE 2011)
会议日期:SEP 23-25, 2011
来源:MECHANICAL AND ELECTRONICS ENGINEERING III, PTS 1-5
出版年:2012
卷:130-134
页码:1250-1253
DOI:10.4028/www.scientific.net/AMM.130-134.1250
关键词:Electrochemical etching; Submicron electrode; Multi-step;; Electrochemical micromachining
摘要:Electrochemical etching is an appropriate method for fabricating micro electrodes. We present a simple, fast, and cost-effective process for producing submicron electrode using multi-step electrochemical etching. In the study, we describe the single-step and multi-step electrochemical etching processes, respectively. In the single-step process, with machining time increasing, the intersection between micro electrode and electrolyte level will corrode off first, which could terminate the etching process. So, on the basis of the single-step process, we experimentally discussed the multi-step electrochemical etching process for the submicron electrode fabrication. Finally, the submicron electrodes were used in the electrochemical micromachining.
收录类别:CPCI-S;EI;SCOPUS
资源类型:会议论文;期刊论文
原文链接:https://www.scopus.com/inward/record.uri?eid=2-s2.0-81355135605&doi=10.4028%2fwww.scientific.net%2fAMM.130-134.1250&partnerID=40&md5=d2853491a0ee65583a8684d6a23e1298
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