标题:Tipping solutions: emerging 3D nano-fabrication/-imaging technologies
作者:Seniutinas, Gediminas; Balcytis, Armandas; Reklaitis, Ignas; Chen, Feng; Davis, Jeffrey; David, Christian; Juodkazis, Saulius
作者机构:[Seniutinas, Gediminas; David, Christian] Paul Scherrer Inst, CH-5232 Villigen, Switzerland.; [Seniutinas, Gediminas; Balcytis, Armandas; Juodkazis, 更多
通讯作者:Seniutinas, Gediminas
通讯作者地址:[Seniutinas, G]Paul Scherrer Inst, CH-5232 Villigen, Switzerland;[Seniutinas, G; Juodkazis, S]Swinburne Univ Technol, Ctr Microphoton, Fac Sci Engn & 更多
来源:NANOPHOTONICS
出版年:2017
卷:6
期:5
页码:923-941
DOI:10.1515/nanoph-2017-0008
关键词:Nanotechnology; nanofabrication; nanophotonics; 3D fabrication;; nanoscale
摘要:The evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM). Fabrication and in situ imaging of materials undergoing a three-dimensional (3D) nano-structuring within a 1-100 nm resolution window is required for future manufacturing of devices. This level of precision is critically in enabling the cross-over between different device platforms (e.g. from electronics to micro-/nano-fluidicsand/or photonics) within future devices that will be interfacing with biological and molecular systems in a 3D fashion. Prospective trends in electron, ion, and nano-tip based fabrication techniques are presented.
收录类别:EI;SCOPUS;SCIE
WOS核心被引频次:5
Scopus被引频次:4
资源类型:期刊论文
原文链接:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85027404722&doi=10.1515%2fnanoph-2017-0008&partnerID=40&md5=3bbb1e54b82889bc99c1f4893b4c90e5
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