标题:Development of a Compact XYZ Nanopositioner Supporting Optical Scanning
作者:Wang, Yue; Yan, Peng
通讯作者:Yan, P;Yan, P
作者机构:[Wang, Yue; Yan, Peng] Shandong Univ, Sch Mech Engn, Minist Educ, Key Lab High Efficiency & Clean Mech Manufacture, Jinan, Shandong, Peoples R China.; 更多
会议名称:IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
会议日期:AUG 13-17, 2018
来源:2018 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) - CONFERENCE PROCEEDINGS
出版年:2018
页码:288-293
关键词:Optical scanning system; nanopositioner; PZT; flexure mechanism; lever; amplifier
摘要:In this paper we consider the design, analysis and experimental validations of an XYZ PZT driven nano-positioning stage to support high precision optical scanning systems. The overall motion stage consists of a parallel XY-nanopositioner and a Z-axis nanopositioner mounted in series on the XY stage. To achieve fast and high precision motions with loads from the optical systems, a novel hollow structural design is proposed, where the flexure based mechanism is further optimized to increase the output displacement while ensuring a relatively high natural frequency. Then the static model of the stage is developed for the lever and guiding mechanisms and its accuracy is verified by FEA(Finite Element Analysis). The proposed 3-DOF(Degree of Freedom) nanopositioner is manufactured and experimentally investigated. Experimental tests show that the nanopositioner has natural frequencies of 855 Hz, 865 Hz and 1019 Hz for X, Y and Z axes, respectively. Meanwhile the maximum travel ranges of 71 mu m, 71 mu m and 52 mu m are obtained along x, y and z directions, which demonstrate large strokes and relatively high natural frequencies for the 3-DOF optical nanopositioner.
收录类别:CPCI-S
资源类型:会议论文
TOP