摘要:The thermal resistance model of multi-finger HBTs is established, and then the expressions of self-heating thermal resistance and coupling thermal resistance are derived. Self-heating thermal resistance is used to characterize the self-heating effect, coupling thermal resistance is used to characterize the thermal coupling effect, furthermore, thermal resistance matrix is used to characterize the thermal effect of multi-finger HBTs. Results show that thermal resistance matrix can be used to characterize the thermal effect of multi-finger HBT, and the temperature distribution of HBT can be got by the thermal resistance distribution.