标题:OPTICAL PLANAR WAVEGUIDES IN KTIOPO4 CRYSTALS BY MEV OXYGEN ION IMPLANTATION
作者:Chen Feng;Wang Xuelin;Wang Keming;Wang Lei;Jiao Yang;Wang Liangling;Lu Qingming;Ma Hongji;Lu Qingming
作者机构:[Chen, F] School of Physics and Microelectronics, Shandong University, Jinan 250100, China;[ Wang, X.-L] School of Physics and Microelectronics, Shand 更多
通讯作者:Chen, F(drfchen@sdu.edu.cn)
通讯作者地址:[Chen, F]Shandong Univ, Sch Phys & Microelect, Jinan 250100, Peoples R China.
来源:中国物理快报(英文版)
出版年:2006
卷:23
期:6
页码:1501-1503
关键词:Optical Planar Waveguides; KTiOPO4 Crystals
摘要:We report on the optical planar waveguide formation in KTiOPO4 crystals by single or double oxygen ion implantation at energies of 2.4-3.0 MeV and doses of 10(15) ions/cm(2). The dark-line spectroscopy properties are investigated by a prism-coupling method. With an effective refractive index method, the refractive index profiles of the waveguides are reconstructed. The program code TRIM'98 (transport of ions in matter) is used to simulate the implantation process of oxygen ions into the KTiOPO4 crystal. It is found that an inherent relationship exists between the nuclear damage and the refractive index changes induced by the ion-beam implantation.
收录类别:CSCD;SCOPUS;SCIE
资源类型:期刊论文
原文链接:https://www.scopus.com/inward/record.uri?eid=2-s2.0-33746679232&doi=10.1088%2f0256-307X%2f23%2f6%2f040&partnerID=40&md5=dbcfd620cea4f8b8d8e1dfdf05429c0f
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