标题：Periodical channel waveguide in KTP formed by ion-exchange and ion implantation
作者：Qin, Zhenhua ;Lu, Fei ;Ming, Xianbing ;Yin, Jiaojian ;Ma, Yujie
作者机构：[Qin, Zhenhua ;Lu, Fei ;Ming, Xianbing ;Yin, Jiaojian ;Ma, Yujie ] Shandong Provincial Key Laboratory of Laser Technology and Application, School of I 更多
会议名称：2011 Symposium on Photonics and Optoelectronics, SOPO 2011
会议日期：16 May 2011 through 18 May 2011
来源：2011 Symposium on Photonics and Optoelectronics, SOPO 2011
关键词：Channel waveguide; End-face coupling introduction; Ion exchange; Ion implantation
摘要：KTP crystal is firstly implanted by 2MeV He+ at room temperature to form a damage layer at a depth of about 6μm. A Cr coating patterned with periodical open strips is then deposited on the sample surface. Ion exchange is carried out in a selected ratio Ba(NO3)2/RbNO3 solution at 340 °C for 30mins. An enhanced index region surrounded by damage layer and virgin KTP is obtained by Rb+/K+ exchange. Channel waveguide is detected and analyzed. © 2011 IEEE.