标题：Nanoadhesive materials on micro cutters in micro/nanomilling of single crystal silicon
作者：Liu, H.Y. ;Huang, Y.M. ;Cheng, X. ;Yang, X.G.
作者机构：[Liu, H.Y. ;Huang, Y.M. ;Yang, X.G. ] School of Mechanical Instrumental Engineering, Xi'an University of Technology, Xi'an; 710048, China;[Cheng, X. ] 更多
来源：Materials Research Innovations
摘要：Nanomaterials adhesive to cutters in micro/nanomilling of single crystal silicon affect brittle-toductile transitions, because the nanomaterials adhesive to micro tools change the cutting conditions greatly. The nanomaterials are unknown and need to be studied to assure the stable micro/nanomilling of single crystal silicon for various very important engineering applications. Based on the results measured by energy dispersive X-ray spectroscopy, the dominant nanoadhesive materials are studied and identified. It turns out that the chemical reactions occurred during high-speed frictions between the cutter and the silicon. The countermeasures are proposed to remove the nanoadhesive material in process to assure the possibilities for long-time continuous ductile-regime micro/nanomilling of single crystal silicon. Experimental evaluations show the feasibility of the study.
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