标题：An Accurate In-Fixture Measurement Method for AlN Film Bulk Acoustic Resonators
作者：Xu, Hang; Su, Yanjie; Yang, Hanlin; Xu, Dong; Zhang, Yafei; Chen, Da; Liu, Yijian
作者机构：[Xu, Hang; Su, Yanjie; Yang, Hanlin; Xu, Dong; Zhang, Yafei] Shanghai Jiao Tong Univ, Inst Micro Nano Sci & Technol, Shanghai 200030, Peoples R China. 更多
会议名称：4th International Symposium on Information Science and Engineering (ISISE)
会议日期：DEC 14-16, 2012
来源：2012 INTERNATIONAL SYMPOSIUM ON INFORMATION SCIENCE AND ENGINEERING (ISISE)
关键词：in-fixture; FBAR; de-embedding; real-time; accurate measurement
摘要：In this paper, a solid mounted FBAR working at 2.0 GHz was fabricated, which was intended for high sensitive molecular sensing. To measure the devices conveniently and accurately on the board, an in-fixture measurement method based on the de-embedded technique using the fixture model and the measured S -parameters is developed with high precision to get rid of the cumbrous probe station. The fixture was modeled accurately and the results were compared with that from the probe station. Optimized approaches have been developed with small deviations, enabling some gas or biochemical tests in real time.