标题：Planar and channel waveguides in fused silica fabricated by multi-energy C ion in the visible and near-infrared band
作者：Liu, Tao; Huang, Qing; Liu, Peng; Guo, Sha-Sha; Zhang, Lian; Zhou, Yu-Fan; Wang, Xue-Lin
作者机构：[Wang, Xue-Lin] Shandong Univ, Sch Phys, State Key Lab Crystal Mat, Jinan 250100, Peoples R China.; Shandong Univ, Key Lab Particle Phys & Particle 更多
会议名称：18th International Conference on Ion Beam Modifications of Materials (IBMM)
会议日期：SEP 02-07, 2012
来源：NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
关键词：Optical waveguide; Ion implantation; Fused silica
摘要：Fused quartz is a key material in fabrication of integrated devices, which transmits extends from ultraviolet to infrared. We report the fabrication of planar and channel waveguides in fused quartz using multi-energy C ion at energies of (5 + 5.5 + 6) MeV and fluences of (1 + 1 + 1.5) x 10(15) ions/cm(2). The guiding modes at the wavelength of 633 nm (He-Ne laser) and 1539 nm (diode laser) were detected using the prism-coupling method, and the modes were stable after annealing in air. The refractive index profiles of planar and channel waveguides at the wavelength of 633 nm and 1539 nm were typical "well + barrier" distributions, which were reconstructed using the reflectivity calculation method (RCM) software and intensity calculation method (ICM), respectively. For comparison to the experimental results, the finite difference beam propagation method (FD-BPM) was used to simulate the guiding modes of the waveguides. We measured the near-field intensity distributions for the visible (633 nm) and near-infrared (1300 nm, 1539 nm and 1620 nm) wavelength regions, suggesting that the modes can be effective transmission in the wavelength range for optical fiber communications. (C) 2013 Elsevier B.V. All rights reserved.