标题:The Research on the Model of a Precision Magnetic Stage System
作者:Zhang, Yi; Sun, Huizhi; Zhou, Hong
通讯作者:Zhang, Y
作者机构:[Zhang, Yi; Zhou, Hong] Shandong Univ Sci & Technol, Qingdao, Peoples R China.; [Sun, Huizhi] Shandong Transport Vocat Coll, Weifang, Peoples R Chin 更多
会议名称:2nd International Conference on Manufacturing Science and Engineering
会议日期:APR 09-11, 2011
来源:ADVANCED MANUFACTURING SYSTEMS, PTS 1-3
出版年:2011
卷:201-203
页码:2079-2082
DOI:10.4028/www.scientific.net/AMR.201-203.2079
关键词:HALBACH Magnet Array; The Same Plane; Nonlinearity; Nanometer Precision
摘要:This paper introduces the structure and work principle of a two-coordinate precision magnetic stage. "The same plane" mode and magnetic driver is adopted, on the basis of analytical field, and response simulation is finished. The experiments result expresses that the positioning accuracy of the magnetic stage reaches nanometer accuracy.
收录类别:CPCI-S;EI
资源类型:会议论文
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