标题：Planar Motion Measurement of a Compliant Micro Stage: An Enhanced Microscopic Vision Approach
作者：Su, Gaozhao; Lu, Guoliang; Yan, Peng
作者机构：[Su, Gaozhao; Lu, Guoliang; Yan, Peng] Shandong Univ, Natl Demonstrat Ctr Expt Mech Engn Educ, Key Lab High Efficiency & Clean Mech Manufacture, MOE,S 更多
通讯作者地址：Lu, GL; Yan, P (corresponding author), Shandong Univ, Natl Demonstrat Ctr Expt Mech Engn Educ, Key Lab High Efficiency & Clean Mech Manufacture, MOE,S 更多
来源：IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
关键词：Block matching; compliant micro stage; micro vision; particle swarm; optimization (PSO); three-step search (S-TSS)
摘要：This paper presents an enhanced microscopic vision-based approach supporting fast and high-precision measurement on planar motions of a multi-degree of freedom (DOF) compliant stage with sub-micrometer motion accuracy. The proposed method is based on an improved particle swarm optimization (PSO) algorithm, including two phases. First, an inverted pyramid structure is employed to divide the solution space into a top-level solution space, such that the expected solution can be quickly located into a smaller range from bottom to top. Then, the spacial three search step (S-TSS) algorithm is applied to achieve an accurate result. The effectiveness of the proposed method is evaluated on a three-DOF micro stage with translational and rotational motions, where comparative studies with existing results are also conducted. The experimental results demonstrate significant improvement on algorithm efficiency without sacrificing the measurement accuracy, which indicates good potential for visual servo control of such micro stages with the proposed approach.