标题：Annealing Effect on Transport and Magnetic Properties of La0.67Sr0.33MnO3 Thin Films Grown on Glass Substrates by RF Magnetron Sputtering
作者：Fang, Shaojie; Pang, Zhiyong; Wang, Fenggong; Lin, Liang; Han, Shenghao
作者机构：[Fang Shaojie] School of Physics,State Key Laboratory of Crystal Materials,Shandong University, Jinan, Shandong 250100, China.;[Pang Zhiyong] School o 更多
通讯作者地址：[Han, SH]Shandong Univ, Sch Phys, State Key Lab Crystal Mat, Jinan 250100, Peoples R China.
关键词：La0.67Sr0.33MnO3; Annealing; Magnetron sputtering; Nanocrystalline
摘要：The manganite La0.67Sr0.33MnO3 (LSMO) thin films were grown on glass substrates in a mixed argon and oxygen atmosphere by using RF magnetron sputtering. The structural characteristics, transport behaviors and magnetic properties of LSMO films were studied by annealing the films in air at 550 and 620 degrees C. The out-of-plane lattice parameter a(LSMO) contracted after annealing and was close to that of bulk LSMO a(bulk), indicating that the internal strain was fully relaxed. Nanocrystalline grains were observed in the annealed films. Enhanced saturation magnetization and metal-to-insulator transition temperature (T-MI=268 K) were also obtained. Curie temperatures (T-c) of the as-grown films was 340 K with the same as that of annealed at 550 degrees C, but dropped to 315 K when the annealing temperature increased to 620 degrees C, which can be attributed to the oxygen release during annealing in atmosphere.