标题：Fractional Order Controller Design for Compound Axis Laser Beam Scanning
作者：Gao, Feng; Yan, Peng
作者机构：[Gao, Feng; Yan, Peng] Beihang Univ, Sch Automat Sci & Elect Engn, Beijing, Peoples R China.; [Yan, Peng] Shandong Univ, Sch Mech Engn, Jinan, Shand 更多
会议名称：Chinese Automation Congress (CAC)
会议日期：OCT 20-22, 2017
来源：2017 CHINESE AUTOMATION CONGRESS (CAC)
关键词：Beam scanning servo system; time delay; fractional order controller; PQ; method
摘要：High performance beam scanning is one of the key enabling techniques in various laser applications, where voice coil actuators (VCA) and acousto-optical deflectors (AOD) have been employed to guide the beam deflection. To further improve the deflection angle and accuracy of the beam scanning systems, it is now possible to combine the VCA and AOD actuators as a compound axis servo system, where the dual-input single-output (DISO) structure and the existence of time delays in AOD pose major control challenges. For the control of such DISO systems in the presence of time delays, a fractional order (FO) control design methodology is investigated in the present paper to support trajectory tracking/scanning of laser beams. The proposed FO controller follows a PQ structure with an internal model control (IMC) based component to simplify the parameter tuning process. Finally, the effectiveness of the proposed controller is demonstrated by various simulations.