标题：KINETOSTATICS MODELING AND DECOUPLING ANALYSIS OF A CROSSHAIR FLEXURES-BASED NANOPOSITIONER
作者：Liu, Pengbo; Lu, Songsong; Yan, Peng; Zhang, Zhen
作者机构：[Liu, Pengbo; Lu, Songsong; Yan, Peng] Shandong Univ, Sch Mech Engn, Key Lab High Efficiency & Clean Mech Manufacture, Minist Educ, Jinan 250061, Shan 更多
会议名称：ASME International Design Engineering Technical Conferences / Computers and Information in Engineering Conference (IDETC/CIE 2017)
会议日期：AUG 06-09, 2017
来源：PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, 2017, VOL 5A
摘要：In the present paper, we take the input and output decoupling into account and propose a 2-DOF parallel nanopositioner, which is composed of lever amplification mechanisms, compound parallelogram mechanisms and novel crosshair flexures. In order to demonstrate the decoupling performance improvement of the crosshair flexures, the stiffness model of the crosshair flexures and the kinetostatics model of the nanopositioner are established based on Castigliano's theorem and the compliance matrix method. Accordingly, the input and output decoupling compliance matrix models are derived to demonstrate the excellent decoupling property of the crosshair flexures based nanopositioner; which is further verified by finite-element analysis and experimental results. The open-loop experiments on the prototype stage demonstrate the maximum stroke of the nanopositioner is up to 65 m and the cross axis coupling errors are less than 1.6%.