标题：A Simple Model for the Calculation of Plasma Impedance in Atmospheric Radio Frequency Discharges
作者机构：[葛蕾;张远涛]Shandong Provincial Key Lab of UHV Technology and Gas Discharge Physics,School of Electrical Engineering, Shandong University, Jinan 2500 更多
通讯作者地址：[Zhang, YT]Shandong Univ, Sch Elect Engn, Shandong Prov Key Lab UHV Technol & Gas Discharge, Jinan 250061, Peoples R China.
摘要：In atmospheric radio-frequency(rf) discharges, the plasma parameters, such as electron density, sheath thickness and sheath voltage, are not easy to be probed experimentally, while the electrical characteristics, such as impedance, resistance and reactance, are relatively convenient to be measured. In this paper we presented a simple theoretical model derived from the fluid description of generated plasmas without considering the circuit model, to investigate the relationship between the plasma impedance and plasma parameters. By introducing a relaxation frequency, the plasma impedance could be predicted by formulas presented in this study, and the mean electron density and sheath thickness can also be calculated from the measured or simulated impedance and reactance, respectively.