标题:A Simple Model for the Calculation of Plasma Impedance in Atmospheric Radio Frequency Discharges
作者:葛蕾[1];张远涛[1]
作者机构:[葛蕾;张远涛]Shandong Provincial Key Lab of UHV Technology and Gas Discharge Physics,School of Electrical Engineering, Shandong University, Jinan 2500 更多
通讯作者:Zhang, Yuantao
通讯作者地址:[Zhang, YT]Shandong Univ, Sch Elect Engn, Shandong Prov Key Lab UHV Technol & Gas Discharge, Jinan 250061, Peoples R China.
来源:等离子体科学与技术:英文版
出版年:2014
卷:16
期:10
页码:924-929
DOI:10.1088/1009-0630/16/10/05
关键词:等离子体参数;射频放电;电路模型;阻抗;计算;大气;电子密度;电特性;
摘要:In atmospheric radio-frequency(rf) discharges, the plasma parameters, such as electron density, sheath thickness and sheath voltage, are not easy to be probed experimentally, while the electrical characteristics, such as impedance, resistance and reactance, are relatively convenient to be measured. In this paper we presented a simple theoretical model derived from the fluid description of generated plasmas without considering the circuit model, to investigate the relationship between the plasma impedance and plasma parameters. By introducing a relaxation frequency, the plasma impedance could be predicted by formulas presented in this study, and the mean electron density and sheath thickness can also be calculated from the measured or simulated impedance and reactance, respectively.
收录类别:EI;SCOPUS;SCIE
Scopus被引频次:1
资源类型:期刊论文
原文链接:http://lib.cqvip.com/qk/84262X/201410/662609418.html
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