标题：Research on calibration of semiconductor DC tiny current source
作者：Liu, Chong ;Yu, Li Hong ;Xu, Ying Chun
作者机构：[Liu, Chong ;Yu, Li Hong ] Yizhuang Economic and Technological Development Area, No.8, TongjiNanlu, Beijing, China;[Xu, Ying Chun ] Guilin University 更多
会议名称：2012 2nd International Conference on Machinery Electronics and Control Engineering, ICMECE 2012
会议日期：December 29, 2012 - December 30, 2012
来源：Applied Mechanics and Materials
摘要：Semiconductor DC tiny current source is the equipments that can produce pA tiny current level. It is widely used in aerospace engineering, semiconductor circuit testing, new nano materials research, analysis science of development of life, etc with its unique advantages of high sensitivity and resolution in producing tiny current signal. It is a new challenge to calibrate these precise semiconductor DC tiny current sources in metrology. This passage did detailed studies on the domestic and foreign existing calibration methods, then developed a high resistance box, built semiconductor DC tiny current source calibration device, and developed automatic calibration software. In this paper, also the uncertainties of the calibration results had analyzed to fulfill the calibration of this tiny current source. © (2013) Trans Tech Publications, Switzerland.