标题:Cross-Axis Coupling Reduction of a Parallel Compliant Nanopositioner Using Disturbance Observer-Based Design
作者:Yang Xiaodong; Zhang Zhen; Yan Peng
通讯作者:Zhang, Z;Zhang, Z;Zhang, Z
作者机构:[Yang Xiaodong; Zhang Zhen] Tsinghua Univ, State Key Lab Tribol, Dept Mech Engn, Beijing 100084, Peoples R China.; [Yang Xiaodong; Zhang Zhen] Tsing 更多
会议名称:36th Chinese Control Conference (CCC)
会议日期:JUL 26-28, 2017
来源:PROCEEDINGS OF THE 36TH CHINESE CONTROL CONFERENCE (CCC 2017)
出版年:2017
页码:9777-9781
关键词:Nanopositioning; Cross-Axis Coupling; Disturbance observer
摘要:Cross-axis coupling is an important motion error source of parallel mechanism. This issue poses a challenge on large range XY compliant nanomanipulating systems to achieve the desired motion quality. In this work, the repetitive controller is utilized to track periodic inputs. Also the cross-axis coupling of the XY parallel mechanism is treated as an equivalent disturbance in each axis, and the equivalent disturbance induced by one axis might contain non-harmonic components of the input to another axis. Hence a DOB-based design is utilized to restrict the cross-axis coupling, and its effectiveness is experimentally validated.
收录类别:CPCI-S
资源类型:会议论文
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