标题：Modeling and control of a piezoelectric-actuated nano-positioner: An hierarchical composite anti-disturbance control approach
作者：Leng, Tongtong ;Yan, Peng ;Guo, Lei
作者机构：[Leng, Tongtong ] Ministry of Education, School of Mechanical Engineering, Shandong University, 17923 JingShi Road, Jinan, Shandong, China;[Yan, Peng 更多
会议名称：2014 11th World Congress on Intelligent Control and Automation, WCICA 2014
会议日期：29 June 2014 through 4 July 2014
来源：Proceedings of the World Congress on Intelligent Control and Automation (WCICA)
关键词：Anti-disturbance control; Disturbance-observer-based control; H∞ control; Nano-positioner
摘要：This paper studies the anti-disturbance control for ultra-high precision positioning of a piezoelectric-actuator driven nano-positioner, subjects to nonlinear dynamics and various external disturbances. In this particular study, the multiple-disturbance is supposed to have two parts. One is the undesired vibration resonance, which could be described by an exogenous dynamical system. The other includes model uncertainties and external random disturbances, which can be considered to have bounded norms. The physical model of the nano-positioning stage is discussed and a composite control law is then presented, where disturbance-observer-based control (DOBC) is formulated for feedforward compensation of the vibrations. Then a composite controller consisting of DOBC and an H∞ controller is developed to achieve the anti-disturbance performance. Finally, simulations and experiments on the nanostage are deployed to demonstrate the anti-disturbance performance by combining DOBC with H∞ control. © 2014 IEEE.