标题:The adhesion strength and mechanical properties of SiC films deposited on SiAlON buffer layer by magnetron sputtering
作者:Song, Shumei; Sun, Hui; Chen, Sheng-Chi; Dai, Mingjiang; Wang, Kunlun; Zheng, Xiaoyan; Lu, Yingbo; Yang, Tianlin; Yue, Zhen-Ming
作者机构:[Song, Shumei; Sun, Hui; Wang, Kunlun; Zheng, Xiaoyan; Lu, Yingbo; Yang, Tianlin] Shandong Univ Weihai, Sch Space Sci & Phys, 180 Wenhuaxi Rd, Weihai 更多
通讯作者:Sun, Hui;Sun, H
通讯作者地址:[Sun, H]Shandong Univ Weihai, Sch Space Sci & Phys, 180 Wenhuaxi Rd, Weihai 264209, Peoples R China.
来源:SURFACE & COATINGS TECHNOLOGY
出版年:2019
卷:360
页码:116-120
DOI:10.1016/j.surfcoat.2018.12.115
关键词:SiC; SiAlON; Buffer layer; Adhesion strength; Hardness
摘要:Herein, SiC films were prepared by DC pulse magnetron sputtering on ceramic substrates using SiAlON as buffer layer. The influence of SiAlON buffer layer thickness on the structural, morphological, and mechanical properties of the SiC/SiAlON bilayers was discussed. The result show that SiAlON buffer layer can effectively improve the adhesion strength of SiC films, while the hardness of the SiC/SiAlON bilayers isn't suppressed a lot. With increase in the buffer layer thickness, the film's adhesion strength gradually increases from 66 N to 83 N, which is much higher than 36 N of single SiC layer. Meanwhile, all the SiC/SiAlON films maintain great hardness between 20 GPa and 25 GPa.
收录类别:EI;SCOPUS;SCIE
资源类型:期刊论文
原文链接:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85059822313&doi=10.1016%2fj.surfcoat.2018.12.115&partnerID=40&md5=de896421b34b9a886867515bbdf2392c
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