标题：Effect of GZO thickness and annealing temperature on the structural, electrical and optical properties of GZO/Ag/GZO sandwich films
作者：Shumei Song;Tianlin Yang;Yanqing Xin;Lili Jiang;Yanhui Li;Zhiyong Pang;Maoshui Lv;Shenghao Han
作者机构：[Song, S] School of Space Science and Physics, Shandong University at Weihai, Weihai, 264209 Shandong, China, School of Physics, State Key Laboratory 更多
通讯作者地址：[Yang, TL]Shandong Univ, Sch Phys, State Key Lab Crystal Mat, Jinan 250100, Peoples R China.
来源：Current applied physics: the official journal of the Korean Physical Society
摘要：The GZO/Ag/GZO sandwich films were deposited on glass substrates by RF magnetron sputtering of Gadoped ZnO (GZO) and ion-beam sputtering of Ag at room temperature. The effect of GZO thickness and annealing temperature on the structural, electrical and optical properties of these sandwich films was investigated. The microstructures of the films were studied by X-ray diffraction (XRD). X-ray diffraction measurements indicate that the GZO layers in the sandwich films are polycrystalline with the ZnO hexagonal structure and have a preferred orientation with the c-axis perpendicular to the substrates. For the sandwich film with upper and under GZO thickness of 40 and 30 nm, respectively, it owns the maximum figure of merit of 5.3 102 X1 with a resistivity of 5.6 105 X cm and an average transmittance of 90.7%. The electrical property of the sandwich films is improved by post annealing in vacuum. Comparing with the as-deposited sandwich film, the film annealed in vacuum has a remarkable 42.8% decrease in resistivity. The sandwich film annealed at the temperature of 350 C in vacuum shows a sheet resistance of 5 X/sq and a transmittance of 92.7%, and the figure of merit achieved is 9.3 102 X1.