标题：Refractive index change in ion-implanted LiNbO3 waveguides calculated from lattice damage ratio
作者：Huang, Qing; Zhao, Jin-Hua; Liu, Peng; Guan, Jing; Wang, Xue-Lin
作者机构：[Huang, Qing; Zhao, Jin-Hua; Liu, Peng; Guan, Jing; Wang, Xue-Lin] Shandong Univ, Sch Phys, Jinan 250100, Peoples R China.; [Wang, Xue-Lin] Shandong 更多
通讯作者地址：[Huang, Q]Shandong Univ, Sch Phys, Jinan 250100, Peoples R China.
来源：JOURNAL OF APPLIED PHYSICS
摘要：We related the refractive index change in ion-implanted LiNbO3 crystals to the lattice damage ratio using a quadratic polynomial relationship. We used this relationship to calculate the refractive index profiles of z-cut LiNbO3 crystals implanted with oxygen ions using different energies, fluences, and annealing treatments. A highly damaged surface layer with a decreased refractive index was caused by electronic excitations in LiNbO3 crystals implanted with 4.0 MeV oxygen ions at a fluence of 2x10(15) ions/cm(2), which buried the optical modes inside the crystals. This relationship was also used for the estimation of the lattice damage in ion-implanted LiNbO3 crystals. It could make a quick estimate which was basically agree with the measured damage level. (C) 2010 American Institute of Physics. [doi:10.1063/1.3503414]