标题：An active CMOS LPF for MEMS capacitive accelerometer readout
作者：Chen, Jianghua ;Ni, Xuewen ;Mo, Bangxian
作者机构：[Chen, Jianghua ] School of Information Science and Engineering, Shandong University, Jinan 250100, China;[Ni, Xuewen ;Mo, Bangxian ] Institute of Mic 更多
会议名称：2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology
会议日期：1 November 2010 through 4 November 2010
来源：ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings
关键词：Active low-pass filter; CMOS; Microelectromechanical systems (MEMS); Switched-capacitor
摘要：This paper presents an active low-pass filter with its bandwidth ranging from 100Hz to 8kHz. The signals lower than 500Hz are filtered through the switched capacitor low-pass filter, while those higher than 500Hz are filtered through the continuous-time one. Problems such as charge injection and clock feedthrough in the switched-capacitor circuit are also analyzed and worked out in this design. We use the optimal switch sequence to help eliminate the nonlinearity caused by the charge injection, dummy switches to reduce the coupled charge, and a folded cascode differential input stage with high PSRR to restrain the interference from the power supply. The circuit performance, therefore, has been greatly improved with a half area sharply reduced below 500Hz, especially meeting the needs of MEMS capacitive accelerometer readout. ©2010 IEEE.