标题：Smith Predictor Based ∞ Control for Piezoelectric Nano Stages with Time Delays
作者：Zhang Z.; Yan P.
作者机构：[Zhang, Z] Key Laboratory of High-efficiency and Clean Mechanical Manufacture (Shandong University), Ministry of Education, School of Mechanical Engin 更多
通讯作者地址：[Yan, P] School of Automation Science and Electrical Engineering, Beihang UniversityChina;
来源：2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018
关键词：∞ optimization; hysteresis; Piezoelectric nanomanipulator; Smith predictor; time delays
摘要：Nano precision capacitive displacement sensors have been successfully employed to the servo control of piezoelectric nano stages. However the analog-to-digital (A/D) conversion of the ultra high precision signal results in major time delays for the nano control systems. Meanwhile, the behavior of the hysteresis of piezoactuators can be also approximated as a variable gain cascaded with a frequency varying time delay. The infinite dimensionality of the time delays in nano servo systems poses new challenges for the control of nano stages, where traditional control methods can not be applied directly. In this paper, a linear model with time delays and hysteresis approximation is discussed for piezoelectric nano stages, where the system parameters are further determined using an identification method by experimental data. Furthermore a Smith predictor based robust ∞ controller is developed to achieve high performance and robust stability for the control of nano stages. Real time experiments with the proposed control design are conducted, where robustness against model uncertainties and accurate positioning performance are demonstrated, which outperforms the method without considering time delays. © 2018 IEEE.