标题：EFFECT OF PIEZOELECTRIC LAYERS ON THE SIZE-DEPENDENT PULL-IN INSTABILITY ANALYSIS OF ELECTROSTATICALLY ACTUATED MEMS
作者：Wang, Bing-lei; Zhang, Long; Xiao, Yue
作者机构：[Wang, Bing-lei; Zhang, Long; Xiao, Yue] Shandong Univ, Sch Civil Engn, Dept Engn Mech, Jinan 250061, Peoples R China.; [Xiao, Yue] Peking Univ, Dep 更多
会议名称：10th Symposium on Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA)
会议日期：OCT 30-NOV 02, 2015
来源：PROCEEDINGS OF THE 2015 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS
关键词：Pull-in voltage; Piezoelectric layer; Size effect; Modified couple; stress theory
摘要：With piezoelectric layers attached, the electrostatically actuated microbeam-based MEMS (Micro-Electro-Mechanical Systems) is modelled to study the pull-in instability based on a modified couple stress theory. The nonlinear differential governing equation and boundary conditions of the beam are derived by using Hamilton's principle. The results show that the piezoelectric layers can decrease the pull-in voltage by only applying very small voltage on the MEMS. The study may be helpful to characterize the mechanical and electrostatic properties of small size MEMS, or guide the design of microbeam-based devices for a wide range of potential applications.