标题：Suppression control of positioning noise for dual stage with coupling damper
作者：Zhang, Shan ;Wang, Lei
作者机构：[Zhang, Shan ] Department of Electrical Engineering and Information Technology, Shandong University of Science and Technology, China;[Wang, Lei ] Inst 更多
来源：UPB Scientific Bulletin, Series D: Mechanical Engineering
摘要：Long stroke and nanometer precision positioning technology based on dual stage has important applications in the fields of ultra precision machinery and equipment, which consists of a coarse stage for long stroke and a fine one for high precision. In order to further suppress the positioning noise of dual stage, we design an abdominal and passive damper for the fine stage. However, it becomes a coupling damper owing to its location. Therefore, we explore that whether it is still effective in suppressing the positioning noise of the system and how we should choose it reasonably. Then, model of dual stage with coupling damper is established based on parallel dual servo control, and used to study the effect law of coupling damper and reveal its effect on noise transmission and dynamic characteristics of each stage. In addition, a series of system tests are followed, and it is verified that coupling damper can be used to suppress the positioning noise of dual stage, and reduce the relative distance between coarse and fine stage.