标题:Fabrication and electrical properties of sol-gel derived (BaSr)TiO3 thin films with metallic LaNiO3 electrode
作者:Wu, D; Li, AD; Liu, ZG; Ling, HQ; Ge, CZ; Liu, XY; Wang, H; Wang, M; Lu, P; Ming, NB
通讯作者:Li, AD
作者机构:[Wu, D; Li, AD; Liu, ZG; Ling, HQ; Ge, CZ; Liu, XY; Wang, H; Wang, M; Lu, P; Ming, NB]Nanjing Univ, Natl Lab Solid State Microstruct 更多
会议名称:Symposium on Thin Films Epitaxial Growth and Nanostructures, at the E-MRS Spring Meeting 1998
会议日期:JUN 16-19, 1998
来源:THIN SOLID FILMS
出版年:1998
卷:336
期:1-2
页码:172-175
DOI:10.1016/S0040-6090(98)01223-1
关键词:BST thin film; LaNiO3; sol-gel processing; metal-organic decomposition
摘要:Metallicc LaNiO3 (LNO) films were prepared on LaAlO3 (LAO) and Si substrates by metal-organic decomposition (MOD) and their application as the bottom electrode for sol-gel derived (BaSr)TiO3 (BST) thin films was studied. X-ray diffraction, atomic force microscope and electrical measurements were used to characterize the multilayer films of BST/LNO/substrates. BST film on LNO-coated LAO substrate exhibited preferred (100) orientation. Smooth and dense surface with fine grains (similar to 50 nm) was observed. The electrical measurement results on BST films using LNO and stainless steel as the bottom electrodes, respectively, showed BST/LNO/substrates have higher dielectric constant, lower loss tangent, lower leakage current and higher breakdown voltage. (C) 1998 Elsevier Science S.A. All rights reserved.
收录类别:CPCI-S;SCOPUS;SCIE
WOS核心被引频次:19
Scopus被引频次:20
资源类型:会议论文;期刊论文
原文链接:https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032313044&doi=10.1016%2fS0040-6090%2898%2901223-1&partnerID=40&md5=abd36b56e0ad093c9325c94a5f5c20b3
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