标题：Numerical Simulations on Nanosecond Pulse Laser Annealing in Vertical Polycrystalline Si Macaroni Channel
作者：Ma, Fushuai; Zhan, Xuepeng; Li, Yuan; Chen, Jiezhi
作者机构：[Ma, Fushuai; Zhan, Xuepeng; Li, Yuan; Chen, Jiezhi] Shandong Univ, Sch Informat Sci & Engn, Qingdao 266237, Peoples R China.
会议名称：14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)
会议日期：OCT 31-NOV 03, 2018
来源：2018 14TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT)
摘要：Laser annealing process has recently been reported as an efficient strategy to produce high quality poly-Si channel in 3D NAND flash memories. However, the understanding of the thermal budget associated with laser annealing process is still inadequate. Here, a numerical study is presented to simulate laser annealing process in a vertical poly-Si macaroni structures. The simulations are performed by using a finite difference method focused on both the spatial and temporal distributions of the laser annealing temperature, which is difficult to be detected experimentally. It is found that the local temperature is proportional to the laser energy density and inversely proportional to the pulse width. Importantly, impacts of poly-Si channel thickness on the temperature distribution are evaluated by including the detailed annealing conditions, which is important for process optimization in 3D NAND flash memories.