标题:Large dynamic range tracking of an XY compliant nanomanipulator with cross-axis coupling reduction
作者:Zhang, Zhen; Yang, Xiaodong; Yan, Peng
作者机构:[Zhang, Zhen] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China.; [Zhang, Zhen] Tsinghua Univ, Inst Mfg Engn, Beijing 100084, Peo 更多
通讯作者:Yan, Peng;Yan, P
通讯作者地址:[Yan, P]Shandong Univ, Sch Mech Engn, Minist Educ, Key Lab High Efficiency & Clean Mech Mfg, Jinan 250061, Shandong, Peoples R China.
来源:MECHANICAL SYSTEMS AND SIGNAL PROCESSING
出版年:2019
卷:117
页码:757-770
DOI:10.1016/j.ymssp.2018.08.014
关键词:Nano-positioning; Cross-axis coupling; Compliant mechanisms; Tracking
摘要:This paper presents a novel design on a large range compliant XY nanomanipulator with spatial constraints to reduce parasitic motions. Aiming at periodic trajectory tracking of the proposed XY parallel compliant nanomanipulating system, a disturbance observer based (DOB) repetitive control structure is developed such that the cross-axis coupling effects and the stiffness nonlinearity can be treated as disturbances with harmonic and non-harmonic components for rejection purposes. The mechanical design prototype is fabricated and the proposed control algorithm is experimentally validated, where enhanced tracking performance with cross-axis coupling reduction is demonstrated by achieving tracking errors less than 80 nm and a motion stroke over 1 mm. (C) 2018 Elsevier Ltd. All rights reserved.
收录类别:EI;SCOPUS;SCIE
Scopus被引频次:1
资源类型:期刊论文
原文链接:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85052120452&doi=10.1016%2fj.ymssp.2018.08.014&partnerID=40&md5=3379d17e23558d1ef6612d1782523cdd
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