标题：Large dynamic range tracking of an XY compliant nanomanipulator with cross-axis coupling reduction
作者：Zhang, Zhen; Yang, Xiaodong; Yan, Peng
作者机构：[Zhang, Zhen] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China.; [Zhang, Zhen] Tsinghua Univ, Inst Mfg Engn, Beijing 100084, Peo 更多
通讯作者：Yan, Peng;Yan, P
通讯作者地址：[Yan, P]Shandong Univ, Sch Mech Engn, Minist Educ, Key Lab High Efficiency & Clean Mech Mfg, Jinan 250061, Shandong, Peoples R China.
来源：MECHANICAL SYSTEMS AND SIGNAL PROCESSING
关键词：Nano-positioning; Cross-axis coupling; Compliant mechanisms; Tracking
摘要：This paper presents a novel design on a large range compliant XY nanomanipulator with spatial constraints to reduce parasitic motions. Aiming at periodic trajectory tracking of the proposed XY parallel compliant nanomanipulating system, a disturbance observer based (DOB) repetitive control structure is developed such that the cross-axis coupling effects and the stiffness nonlinearity can be treated as disturbances with harmonic and non-harmonic components for rejection purposes. The mechanical design prototype is fabricated and the proposed control algorithm is experimentally validated, where enhanced tracking performance with cross-axis coupling reduction is demonstrated by achieving tracking errors less than 80 nm and a motion stroke over 1 mm. (C) 2018 Elsevier Ltd. All rights reserved.