标题：Fabrication and Performance of Pentacene Thin-film Transistors with SiO2/PMMA Bilayer Dielectric
作者：Zhao, Xurong; Wang, Sumei; Ma, Keke
作者机构：[Zhao, Xurong; Wang, Sumei; Ma, Keke] Shandong Univ, Minist Educ, Key Lab Liquid Solid Struct Evolut & Proc Mat, Jinan 250061, Peoples R China.
会议名称：IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT)
会议日期：OCT 29-NOV 01, 2012
来源：2012 IEEE 11TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT-2012)
摘要：In this paper, the organic pentacene-based thin film transistors with SiO2/PM MA bilayer dielectric were fabricated and the device performance improvement with the varying PM MA concentration was investigated. When the PM MA concentration decreases from 60mg/ml to 20 mg/ml, the device mobility increases from 0.06 to 0.1 cm(2)/Vs, and the on/off current ratio increases from 10(3) to 10(4). Top-contact OTFT devices with double PM MA layer were also fabricated. The results showed that the second PM MA layer can modify the dielectric/semiconductor interface and therefore improve the device performance