标题:Modeling and Active Disturbance Rejection Control for a Piezoelectric-actuator Driven Nanopositioner
作者:Tongtong Leng;Pengbo Liu;Peng Yan;Zhen Zhang;Lei Guo;
作者机构:[Tongtong Leng;Pengbo Liu;Peng Yan;Zhen Zhang;Lei Guo]Key Laboratory of High-efficiency and Clean Mechanical Manufacture, Ministry of Education, Schoo 更多
会议名称:第三十三届中国控制会议
来源:第三十三届中国控制会议论文集(D卷)
出版年:2014
关键词:piezoelectric-actuator driven nanopositioning stage;extended state observer (ESO);active disturbance rejection control (ADRC)
摘要:This paper investigates the modeling and control problem of a novel piezoelectric-actuator(PZT) driven nanopositioner. The physical model of the nanopositioning stage is first discussed with the hysteresis nonlinearity of the PZT actuator. For the purposes of eliminating the hysteresis impact and va...
资源类型:会议论文
原文链接:http://kns.cnki.net/kns/detail/detail.aspx?FileName=KZLL201407004158&DbName=IPFD2014
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