标题:Development of a Compact XYZ Nanopositioner Supporting Optical Scanning
作者:Wang, Yue ;Yan, Peng
通讯作者:Yan, Peng
作者机构:[Wang, Yue ;Yan, Peng ] Key Laboratory of High-efficiency and Clean Mechanical Manufacture, Ministry of Education, School of Mechanical Engineering, S 更多
会议名称:8th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018
会议日期:13 August 2018 through 17 August 2018
来源:2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings
出版年:2018
页码:288-293
DOI:10.1109/3M-NANO.2018.8552171
关键词:flexure mechanism; lever amplifier; nanopositioner; Optical scanning system; PZT
摘要:In this paper we consider the design, analysis and experimental validations of an XYZ PZT driven nano-positioning stage to support high precision optical scanning systems. The overall motion stage consists of a parallel XY-nanopositioner and a Z-axis nanopositioner mounted in series on the XY stage. To achieve fast and high precision motions with loads from the optical systems, a novel hollow structural design is proposed, where the flexure based mechanism is further optimized to increase the output displacement while ensuring a relatively high natural frequency. Then the static model of the stage is developed for the lever and guiding mechanisms and its accuracy is verified by FEA(Finite Element Analysis). The proposed 3-DOF(Degree of Freedom) nanopositioner is manufactured and experimentally investigated. Experimental tests show that the nanopositioner has natural frequencies of 855 Hz, 865 Hz and 1019 Hz for X, Y and Z axes, respectively. Meanwhile the maximum travel ranges of 71 μm, 71 μm and 52 μm are obtained along x, y and z directions, which demonstrate large strokes and relatively high natural frequencies for the 3-DOF optical nanopositioner. © 2018 IEEE.
收录类别:EI;SCOPUS
资源类型:会议论文;期刊论文
原文链接:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85059975430&doi=10.1109%2f3M-NANO.2018.8552171&partnerID=40&md5=e6c5a87ecf453bb8c07ea629d40a7259
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