标题：Development of a Compact XYZ Nanopositioner Supporting Optical Scanning
作者：Wang, Yue ;Yan, Peng
作者机构：[Wang, Yue ;Yan, Peng ] Key Laboratory of High-efficiency and Clean Mechanical Manufacture, Ministry of Education, School of Mechanical Engineering, S 更多
会议名称：8th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018
会议日期：13 August 2018 through 17 August 2018
来源：2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings
关键词：flexure mechanism; lever amplifier; nanopositioner; Optical scanning system; PZT
摘要：In this paper we consider the design, analysis and experimental validations of an XYZ PZT driven nano-positioning stage to support high precision optical scanning systems. The overall motion stage consists of a parallel XY-nanopositioner and a Z-axis nanopositioner mounted in series on the XY stage. To achieve fast and high precision motions with loads from the optical systems, a novel hollow structural design is proposed, where the flexure based mechanism is further optimized to increase the output displacement while ensuring a relatively high natural frequency. Then the static model of the stage is developed for the lever and guiding mechanisms and its accuracy is verified by FEA(Finite Element Analysis). The proposed 3-DOF(Degree of Freedom) nanopositioner is manufactured and experimentally investigated. Experimental tests show that the nanopositioner has natural frequencies of 855 Hz, 865 Hz and 1019 Hz for X, Y and Z axes, respectively. Meanwhile the maximum travel ranges of 71 μm, 71 μm and 52 μm are obtained along x, y and z directions, which demonstrate large strokes and relatively high natural frequencies for the 3-DOF optical nanopositioner. © 2018 IEEE.