标题:Effects of thermal treatment on structure, surface microstructure and optical properties of nitrogen-ion irradiated nanoparticle thin films
作者:Song, Hong-Lian; Yu, Xiao-Fei; Zhang, Lian; Wang, Tie-Jun; Qiao, Mei; Zhang, Jing; Wang, Xue-Lin
通讯作者:Wang, XueLin
作者机构:[Wang, Xue-Lin] Shandong Univ, State Key Lab Crystal Mat, Sch Phys, Jinan 250100, Peoples R China.; [Wang, Xue-Lin] Shandong Univ, Key Lab Particle 更多
会议名称:19th International Conference on Surface Modification of Materials by Ion Beams (SMMIB)
会议日期:NOV 22-27, 2015
来源:SURFACE & COATINGS TECHNOLOGY
出版年:2016
卷:306
页码:87-91
DOI:10.1016/j.surfcoat.2016.05.014
关键词:Rf-magnetron sputtering; Ion irradiation; X-ray diffraction;; Transmittance
摘要:In this paper, we studied the effects of ion irradiation and annealing treatment on the ZnO thin films. ZnO thin films were first prepared on sapphire substrate by rf-magnetron sputtering technique, followed by nitrogen ion irradiation and annealing treatment. The crystallographic properties, surface morphology and optical properties changed after nitrogen ion irradiation and annealing treatment, which were investigated by X-ray diffraction, scanning electron microscopy and absorption spectroscopy. (C) 2016 Elsevier B.V. All rights reserved.
收录类别:CPCI-S;EI;SCOPUS;SCIE
资源类型:会议论文;期刊论文
原文链接:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84969677222&doi=10.1016%2fj.surfcoat.2016.05.014&partnerID=40&md5=1c776ac80e187a63ddd4e986b457a72b
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