标题：Synthesis of molybdenum carbide superconducting compounds by microwave-plasma chemical vapor deposition
作者：Zhao, Hongyang; Cai, Kang; Ma, Zhibin; Cheng, Zhenxiang; Jia, Tingting; Kimura, Hideo; Fu, Qiuming; Tao, Hong; Xiong, Liwei
作者机构：[Zhao, Hongyang; Cai, Kang; Ma, Zhibin; Fu, Qiuming; Tao, Hong; Xiong, Liwei] Wuhan Inst Technol, Sch Mat Sci & Engn, Hubei Key Lab Plasma Chem & Adv 更多
通讯作者地址：[Zhao, HY]Wuhan Inst Technol, Sch Mat Sci & Engn, Hubei Key Lab Plasma Chem & Adv Mat, Wuhan 430073, Hubei, Peoples R China;[Zhao, HY]Shandong Univ, S 更多
来源：JOURNAL OF APPLIED PHYSICS
摘要：A method to synthesize molybdenum carbides has been developed based on microwave plasma treatment with methane and hydrogen mixed gases, using a microwave-plasma chemical vapor deposition device. The device framework and its mechanism are described in detail. Two-dimensional alpha-Mo2C has been directly synthesized by a plate-to-plate substrate holder structure with a microwave power of 920W and a partial pressure of 20 kPa. In-situ optical emission spectroscopy was used to measure the radical types in the plasma ball during glow discharge. The as-grown alpha-Mo2C samples were characterized by X-ray diffraction, transmission electron microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy to determine their phases, purity and chemical groups. The superconducting transition temperature was measured, and the transition temperatures of the relevant phases are discussed in detail. The results confirmed that this method is an efficient way to obtain molybdenum carbides and inspire new research interest in transition metal carbides, which have many intrinsic local properties and applications. Published by AIP Publishing.