标题：Calibration algorithm of unequal step phase-shifting based on checking
作者：Si, Shuchun ;Wang, Yunshan ;Xu, Jianqiang ;Zhou, Canlin ;Gao, Chengyong
作者机构：[Si, Shuchun ;Wang, Yunshan ;Xu, Jianqiang ;Zhou, Canlin ;Gao, Chengyong ] Inst. of Phys. and Microelectronics, Shandong University, Jinan 250061, Chi 更多
会议名称：Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002
会议日期：3 September 2002 through 6 September 2002
来源：Proceedings of SPIE - The International Society for Optical Engineering
关键词：Calibration Algorithm; Image Processing; Phase-measuring profilometry
摘要：The shift step must be an accurate value in the traditional algorithm of phase-measuring profilometry (PMP) technology, the result error is found in unequal step-shifting in which one or more step is not the accurate value. So the phase shifter is expensive to meet the high precision. In this paper, the software is made to give a chart of error phase in any Unequal Step Phase-shifting, and a calibration algorithm is presented to give the correct phase based on this error-phase chart. With the help of computer emluator written by us, the calibration algorithm based on checking proved to be correct. So the precise request of phase shifter is reduced greatly.