标题：Preparation of metallic nanopore arrays using template-guided electrochemical etching
作者：Gao, Yan-Yan; Han, Ai-Juan; Miao, Fang; Li, Guang-Lan; Li, Hui; Zhang, Zuo-Shan; Zhang, Shu-Yong
作者机构：[Zhang, Shu-Yong] Shandong Univ, Minist Educ, Key Lab Interface & Colloid Chem, Jinan 250100, Peoples R China.; Shandong Univ, Sch Chem & Chem Engn, 更多
通讯作者地址：[Zhang, SY]Shandong Univ, Minist Educ, Key Lab Interface & Colloid Chem, Jinan 250100, Peoples R China.
关键词：Nanomaterials; Metallic nanopore arrays; Template-guided electrochemical; etching; Anodic aluminum oxide template; Characterization methods
摘要：For the first time, preparation of metallic nanopore arrays using anodic aluminum oxide membrane template-guided electrochemical etching technique was reported. The procedure consists of four main steps, sputtering of a conductive layer, thickening of the conductive layer by electroplating, template-guided etching of the electroplated metal layer along the nanopores in the anodic aluminum oxide, and removing of the anodic aluminum oxide template. Scanning electronic microscopy. X-ray diffraction and X-ray photoelectron spectroscopy were used for characterization of the Au nanopore arrays, which proved that the nanopores in the Au matrix were generated due to template-guided electrochemical etching. This method can be used for preparation of double-layered nanostructure with through nanopores penetrating the top insulating layer and the bottom conducting layer. (C) 2010 Elsevier B.V. All rights reserved.