标题：Research progress on performance influencing factors of TiB2-BN-AIN composite conductive ceramic evap-orators
作者：Xiaowei S.; Jiahai B.; Qian W.; Qingyang D.; Yong Z.; Chuncheng W.; Cailiao N.
作者机构：[Xiaowei, S] School of Materials Science and Engineering, Shandong University of Technology, Zibo, Shandong 255049, China
关键词：Bending strength; Conductive ceramics; Conductivity; Density; Evaporators; Titanium diboride-boron nitride-aluminium nitride composite ceramics
摘要：Owning the excellent properties of TiB2,BN and AIN, TiB,-BN-AIN (TBA) composite ceramics exhibit high chemical stability. good mechanical properties and certain electrical conductivity, which are mainly used as the evaporators and corrosion-resistant electrodes for vacuum aluminum plating. The re- search progress of using TBA composite ceramics as conductive ceramic evaporators was summarized, and the effects of technologies on the density, electrical conductivity. mechanical properties (bending strength) and service life were analyzed;meanwhile.the existing problems and the future prospects of the TBA conductive ceramic evaporators were discussed. © 2020, Luoyang Naihuo Cailiao Yanjiusuo. All rights reserved.