标题：Modeling and active disturbance rejection control for a piezoelectric-actuator driven nanopositioner
作者：Leng, Tongtong ;Liu, Pengbo ;Yan, Peng ;Zhang, Zhen ;Guo, Lei
作者机构：[Leng, Tongtong ;Liu, Pengbo ;Yan, Peng ] Ministry of Education, School of Mechanical Engineering, Shandong University, 17923 JingShi Road, Jinan; 250 更多
会议名称：Proceedings of the 33rd Chinese Control Conference, CCC 2014
会议日期：28 July 2014 through 30 July 2014
来源：Proceedings of the 33rd Chinese Control Conference, CCC 2014
关键词：active disturbance rejection control (ADRC); extended state observer (ESO); piezoelectric-actuator driven nanopositioning stage
摘要：This paper investigates the modeling and control problem of a novel piezoelectric-actuator (PZT) driven nanopositioner. The physical model of the nanopositioning stage is first discussed with the hysteresis nonlinearity of the PZT actuator. For the purposes of eliminating the hysteresis impact and various disturbances, an active disturbance rejection control (ADRC) algorithm is proposed, where the nonlinear dynamics of the model and external disturbances are treated as 'total disturbances' which can be estimated by an extended state observer (ESO) and then compensated by a state feedback control law. The proposed algorithm is deployed in real time implementations on a nanopositioning servo platform and demonstrates good control performance in terms of high precision positioning and hysteresis elimination. © 2014 TCCT, CAA.