标题：Design of pulse magnetron sputtering deposition control system based on multifunction controller
作者：Liang, Yan ;Qin, Yu ;Wang, Min Xue ;Zhu, Chang Chun
作者机构：[Liang, Yan ;Qin, Yu ;Wang, Min Xue ;Zhu, Chang Chun ] Shaanxi Institute of Metrology Science, No.3 Dongyi Road, Yanta Zone, Xi'an, China
会议名称：2013 3rd International Conference on Machinery Electronics and Control Engineering, ICMECE 2013
会议日期：November 29, 2013 - November 30, 2013
来源：Applied Mechanics and Materials
摘要：A new design technique about pulse magnetron sputtering control system Which bases on multifunction controller and automatic control theory is proposed. This system includes a host PC, a gust multifunctional controller and the local instruments. It controls the process of films deposition automatically and it is also composed of three models corresponding for different operational requests. The characteristic of sputtering deposition films shows the steadily and effectively advantages in this technique. © (2014) Trans Tech Publications, Switzerland.